Preparation of Ti-Al-Si-N Nano-composite Films by Reactive Sputtering
نویسندگان
چکیده
منابع مشابه
Development of Al-Ti-N Composite Coatings on Commercially Pure Ti Surface by Tungsten Inert Gas Process
The present work aims to modify surface properties of pure Ti by development of Ti-Al-N intermetallic composite coatings. In this regard, tungsten inert gas (TIG) cladding process was carried out using Al 1100 as filler rod with Ar and Ar+N2 as shielding gases. Phase and structure of the samples were investigated by X-ray diffraction (XRD) technique, optical microscopy (OM) and scanning electro...
متن کاملHigh-power impulse magnetron sputtering of Ti-Si-C thin films from a Ti3SiC2 compound target
We have deposited Ti-Si-C thin films using high-power impulse magnetron sputtering (HIPIMS) from a Ti3SiC2 compound target. The as-deposited films were composite materials with TiC as the main crystalline constituent. X-ray diffraction and photoelectron spectroscopy indicated that they also contained amorphous SiC, and for films deposited on inclined substrates, crystalline Ti5Si3Cx. The film m...
متن کاملMultifunctional nanostructured Ti-Si-C thin films
In this Thesis, I have investigated multifunctional nanostructured Ti-Si-C thin films synthesized by magnetron sputtering in the substrate-temperature range from room temperature to 900 °C. The studies cover high-temperature growth of Ti3SiC2 and Ti4SiC3, low-temperature growth of Ti-Si-C nanocomposites, and Ti-Si-C-based multilayers, as well as their electrical, mechanical, and thermal-stabili...
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ژورنال
عنوان ژورنال: Journal of the Japan Society of Powder and Powder Metallurgy
سال: 2004
ISSN: 0532-8799,1880-9014
DOI: 10.2497/jjspm.51.802